Semiconductor Microelectronics and Nanoelectronics Programs / Joaquin V. Martinez de Pinillos; Yaw S. Obeng; Michele L. Buckley.
- Physical Description: 1 online resource.
- Publisher: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2010.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page (viewed December 31, 2015).
|Bibliography, etc. Note:||
Includes bibliographical references.