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Semiconductor microelectronics and nanoelectronics programs / Stephen Knight; Joaquin V. Martinez de Pinillos; Yaw S. Obeng; Michele Buckley.

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Series Information

NISTIR ; 7513.

Record details

  • Physical Description: 1 online resource.
  • Publisher: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2008.

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Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Bibliography, etc. Note:
Includes bibliographical references.

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