A Framework for standard modular simulation : application to semiconductor wafer fabrication / Heshan Li [and others].
- Physical Description: 1 online resource (17 pages) : illustrations.
- Publisher: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, 
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page 1, viewed April 6, 2007.
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|Subject:||Semiconductor wafers > Standards.