Record Details

Catalog Search

A Framework for standard modular simulation : application to semiconductor wafer fabrication / Heshan Li [and others].

Image of item

Series Information

NISTIR ; 7236.

Record details

  • Physical Description: 1 online resource (17 pages) : illustrations.
  • Publisher: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2005]

Content descriptions

General Note:
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page 1, viewed April 6, 2007.
Bibliography, etc. Note:
Includes bibliographical references.
Subject: Semiconductor wafers > Standards.

Additional Resources