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Workshop summary report : scanning probe nanolithography workshop / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano.

Dagata, John A. (Added Author). Perez-Murano, Francesc. (Added Author). Yokoyama, Hiroshi. (Added Author). Manufacturing Engineering Laboratory (U.S.) (Added Author).
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Series Information

NISTIR ; 7040.

Record details

  • Physical Description: 1 online resource (86 pages) : illustrations.
  • Publisher: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]

Content descriptions

General Note:
"January 2003."
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page [1], viewed April 6, 2007.
Bibliography, etc. Note:
Includes bibliographical references.
Subject: Nanoelectronics.

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