Nanomanufacturing of atom-based dimensional standards : a final project report of the national advanced manufacturing testbed / T.V. Vorburger; R.H. Allen; B. Damazo; J. Fu; D. Monk; M. Osti; J. Pellegrino; R. Rhorer; R. Russell; R. Silver; R. Sriram; K. Stouffer; D. A. Swyt; E. C. Teague; T. Wheatley; D. Wilmering.
- Physical Description: 1 online resource.
- Publisher: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2002.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
|Bibliography, etc. Note:||
Includes bibliographical references.