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Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP / Dragan M. Pantie [and four others].

Pantic, Dragan M., (author.). Lewis Research Center, (issuing body.).

Record details

  • Physical Description: 1 online resource (15 pages) : illustrations.
  • Publisher: Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center, [1990]

Content descriptions

General Note:
"Performing organization: National Aeronautics and Space Administration, Lewis Research Center"--Report documentation page.
Bibliography, etc. Note:
Includes bibliographical references (page 13).
Type of Report and Period Covered Note:
Technical memorandum.
Funding Information Note:
Sponsored by the National Aeronautics and Space Administration 506-44-21
E-5356
Source of Description Note:
Description based on online resource; title from PDF title page (NASA, viewed July 24, 2017).

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