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Integration of nanostructures into microsensor devices on whole wafers / Azlin M. Biaggi-Labiosa [and three others].

Record details

  • Physical Description: 1 online resource (14 pages) : color illustrations.
  • Publisher: Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, June 2015.

Content descriptions

General Note:
Title from title screen (viewed on April 20, 2016).
"June 2015."
Bibliography, etc. Note:
Includes bibliographical references (pages 12-14).

Additional Resources