Integration of nanostructures into microsensor devices on whole wafers / Azlin M. Biaggi-Labiosa [and three others].
- Physical Description: 1 online resource (14 pages) : color illustrations.
- Publisher: Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, June 2015.
Title from title screen (viewed on April 20, 2016).
|Bibliography, etc. Note:||
Includes bibliographical references (pages 12-14).
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