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A process to produce fine line metallic collection patterns on semiconductors devices.

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Available copies

  • 1 of 1 copy available at Evergreen Indiana.

Current holds

0 current holds with 1 total copy.

Series Information

NASA case ; NPO-16413-1-CU.
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Indiana State Library - Indianapolis NAS 1.71:NPO-16413-1-CU (Text) 766517-1001 General Federal documents Available -

Record details

  • Physical Description: 1 volume.
  • Publisher: [Washington, D.C.] : [National Aeronautics and Space Administration], [1984]

Content descriptions

General Note:
Title from prelim. p. [2].
Distributed to depository libraries in microfiche; shipping list no. not available.
"[Date]: November 19, 1984; filing date: 12/20/84."
Inventor: Brian D. Gallagher; contractor: Jet Propulsion Laboratory.
Reproduction Note:
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1984] 1 microfiche GovDoc Classification No. on header: NAS 1.71:NPO-16413-1.
Subject: Laser beams.

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