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Measurement assurance for dimensional measurements on integrated-circuit photomasks / Carroll Croarkin, Ruth N. Varner.

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Available copies

  • 1 of 1 copy available at Evergreen Indiana.

Current holds

0 current holds with 1 total copy.

Series Information

NBS technical note
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Indiana State Library - Indianapolis C 13.46:1164 (Text) 473045-1001 General Federal documents Available -

Record details

  • Physical Description: v, 44 pages : illustrations ; 28 cm.
  • Publisher: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1982.

Content descriptions

General Note:
"Statistical Engineering Division, Center for Applied Mathematics, National Bureau of Standards."
"Issued August 1982."
Bibliography, etc. Note:
Includes bibliographical references.
Subject: Optical instruments > Calibration.
Integrated circuits > Masks > Measurement.

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