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The capabilities and limitations of auger sputter profiling for studies of semiconductors / S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency.

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Available copies

  • 1 of 1 copy available at Evergreen Indiana.

Current holds

0 current holds with 1 total copy.

Series Information

NBS special publication
Semiconductor measurement technology.
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Indiana State Library - Indianapolis C 13.10:400-67 (Text) 455199-1001 General Federal documents Available -

Record details

  • Physical Description: vi, 46 pages : illustrations ; 26 cm.
  • Publisher: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards, 1981.

Content descriptions

General Note:
"Issued September 1981."
Bibliography, etc. Note:
Includes bibliographical references.
Subject: Sputtering (Physics)
Metal oxide semiconductors.

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