Semiconductor measurement technology : notes on SEM examination of microelectronic devices / John R. Devaney, K. O. Leedy and W. J. Keery.
- 1 of 1 copy available at Evergreen Indiana.
0 current holds with 1 total copy.
Series InformationNBS special publication
|Location||Call Number / Copy Notes||Barcode||Shelving Location||Status||Due Date|
|Indiana State Library - Indianapolis||C 13.10:400-35 (Text)||378987-1001||General Federal documents||Available||-|
- Physical Description: iv, 48 pages, 1 unnumbered page : illustrations ; 26 cm.
- Publisher: Washington : Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.
Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
Issued April 1977.
|Bibliography, etc. Note:||
Bibliography: pages 47-48.
Search for related items by subject
|Subject:||Miniature electronic equipment > Testing.
Semiconductors > Testing.
Scanning electron microscopes > Technique.