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Semiconductor measurement technology : notes on SEM examination of microelectronic devices / John R. Devaney, K. O. Leedy and W. J. Keery.

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  • 1 of 1 copy available at Evergreen Indiana.

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0 current holds with 1 total copy.

Series Information

NBS special publication
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Indiana State Library - Indianapolis C 13.10:400-35 (Text) 378987-1001 General Federal documents Available -

Record details

  • Physical Description: iv, 48 pages, 1 unnumbered page : illustrations ; 26 cm.
  • Publisher: Washington : Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.

Content descriptions

General Note:
Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
Issued April 1977.
Bibliography, etc. Note:
Bibliography: pages 47-48.
Subject: Miniature electronic equipment > Testing.
Semiconductors > Testing.
Scanning electron microscopes > Technique.

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