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Microelectronic test pattern NBS-3 for evaluating the resistivity-dopaut density relationship of silicon / Martin G. Buehler ; Electronic Technology Division.

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Available copies

  • 1 of 1 copy available at Evergreen Indiana.

Current holds

0 current holds with 1 total copy.

Series Information

Semiconductor measurement technology.
NBS special publication
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Indiana State Library - Indianapolis C 13.10:400-22 (Text) 369686-1001 General Federal documents Available -

Record details

  • Physical Description: vi, 49 pages, 1 unnumbered page : illustrations ; 26 cm.
  • Publisher: Washington : U.S. Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976.

Content descriptions

General Note:
"Jointly supported by the National Bureau of Standards, the Defense Nuclear Agency, the Defense Advanced Research Projects Agency, and the Navy Strategic Systems Project Office."
Bibliography, etc. Note:
Bibliography: pages 48-49.
Subject: Integrated circuits > Testing.
Electronic apparatus and appliances > Testing.

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